Abstract-This paper focuses on development of sensors, fabricated in Low Temperature Co-fired Ceramics (LTCC) technology. First sensor is developed for extremely high temperature characterization of LTCC material. Additionally, the influence of used numbers of substrate layers on overall capacitance of IDC has been investigated. Second sensor is developed for detection of liquid presence and quantity. Third sensor is developed for reliability monitoring of LTCC material in water environment. Sensors are planar, interdigital capacitors (IDC), designed and fabricated using CeramTec GC LTCC ceramic tapes as a carrying substrate. First investigation was directed towards temperature dependence of the permittivity and temperature dependence of the IDC capacitance up to 880º C. The second one, shows effect of water penetration through LTCC ceramic material. The third investigation is conducted in order to demonstrate how long LTCC ceramic material keeps its properties while staying in water. Experimental results have proven reliability and good stability and sensitivity of analyzed LTCC ceramic material in high temperature and water environment.Index Terms-Ceramic materials, IDC, LTCC, material properties.

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