We report the first switchable piezoelectric resonator as a building block for a new class of adaptive and reconfigurable filters. The resonator integrates AlN contourmode resonator and RF MEMS capacitive switch technologies to change the coupling between the RF signal electrodes and the AlN piezoelectric film. Modeling reveals that a 1.5 μm gap minimizes coupling, while a 10 nm gap couples nearly as efficiently as an electrode in intimate contact, suggesting that high contrast can be achieved using this approach. Measurements of a 400 ȝm x 150 ȝm two-port resonator demonstrate a switching ratio of 13 dB, a Q of 170, and a center frequency of 240 MHz. Research is continuing with goals of improving the device Q and switching ratio, extending the device operation to other frequencies, and extending the approach to adaptive and reconfigurable filters.

No abstract

No abstract

No abstract

In this paper we present a new slot antenna with an embedded temperature sensor for remote sensing in harsh environment applications. When the antenna is illuminated with a plane wave it returns a signal. The returned signal's frequency is modulated by the loaded capacitance formed by an array of MEMS bimorph (metal-dielectric) cantilevers. The MEMS cantilevers deflect downwards when the temperature is changed from 20q qC to 300qC. As a result, the resonant frequency of the slot is linearly tuned from 19.45 to 19.30 GHz. The design yields a totally passive and integrated antenna/sensor. The MEMS fabrication is inherently robust, does not suffer from the creep or fatigue problems of traditional bimorph temperature sensors, and has a very high manufacturing yield, even in an academic clean room environment.