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Investigation of the statistical variation of integrated passive components is crucial for designing and characterizing the performance of multichip module (MCM) substrates. In this paper, the statistical analysis of three-dimensional (3-D) solenoid inductors manufactured in a multilayer low-temperature cofired ceramic (LTCC) process is presented. A set of integrated inductor structures is fabricated, and their scattering parameters are measured for a range of frequencies from 50 MHz to 5 GHz. Using optimized equivalent circuits obtained from HSPICE, mean and absolute deviation is calculated for each component of each device model. Monte Carlo Analysis for the inductor structures is then performed using HSPICE. Using a comparison of the Monte Carlo results and measured data, it is determined that for even a small number of sample structures, the statistical variation of the component values provides an accurate representation of the overall inductor performance.Index Terms-Embedded passives, low-temperature cofired ceramic (LTCC), Monte Carlo analysis, statistical variation.

In this paper, the statistical analysis of 3-D solenoid inductors manufactured in a multilayer low-temperature cofired ceramic (LTCC) process is presented A set of integrated inductor structures is fabricated, and their scattering parameters are measured for a range of frequencies from 50 Mbz to 5 GHz. Using optimized equivalent circuits ohtained from HSPICE, mean and ahsolute deviation is calculated for each component of each device model. Monte Carlo Analysis for the inductor structures is then performed using HSPICE. Using a comparison of the Monte Carlo results and measured data, it is determined that for even a small number of sample structures, the statistical variation of the component values provides an accurate representation of the overall inductor performance. SE&fCOiP W e s t 2002 SEMP Technology Symposium: l n t e m a t i~~l Electronics Manufachning Technology (EMT) Symposium C78051301MM17.00 0 2 W 2 IEEE 2002 SElVlEEE IEMT RFDesign, vo1.6, n0.2, p.32-6, March-April 1983. SEMICOP west 2002 SEMP Technology Smosium: International Electronics Mmufachring Technology (IEMT) Symposium o~s o~~o ? -M~~~. o o mzwz IEEE 2002 SEMVIEEE IEHT