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In this work, we study the effect of the various substrates on the growth and superconducting properties of NbN thin films grown by using pulsed laser ablation in a N2 + 1%H2 atmosphere on MgO, Al2O3 and Si substrates. Structural and superconducting analyses of the films demonstrate that using MgO and Al2O3 substrates can significantly improve the film properties compared to Si substrate. The X-ray diffraction data indicate that MgO and Al2O3 substrates produce highly oriented superconducting NbN films with large coherent domain size in the out-of plane direction on the order of layer thickness and with a superconducting transition temperature of 13.1 K and 15.2 K, respectively. On the other hand, the NbN film grown on the Si substrate exhibits random polycrystalline orientation. Together with the smallest coherent domain size it leads to the lower critical temperature of 8.3 K. Finally, by using a passivation surface layer we are able to improve superconducting properties of NbN thin film and we observe superconducting transition temperature 16.6 K, the one of the highest value reported so far for 50 nm thick NbN film on sapphire.

Few-layer films of transition metal dichalcogenides have emerged as promising candidates for applications in electronics. Within this group of 2D materials, platinum diselenide (PtSe2) was predicted to be a compound with one of the highest charge carrier mobility. Recently, the successful integration of group III–V nitride semiconductors with NbNx-based superconductors was reported with a semiconductor transistor grown directly on a crystalline superconductor. This opens up the possibility of combining the macroscopic quantum effects of superconductors with the electronic, photonic, and piezoelectric properties of the semiconducting material. Here, we report on the fabrication of a few-layer PtSe2 film on top of an NbN substrate layer by selenization of pre-deposited 3 nm thick Pt layers. We found the selenization parameters preserving the chemical and structural integrity of both the PtSe2 and NbN films. The PtSe2 film alignment can be tuned by varying the nitrogen flow rate through the reaction chamber. The superconducting critical temperature of NbN is only slightly reduced in the optimized samples compared to pristine NbN. The carrier mobility in PtSe2 layers determined from Hall measurements is below 1 cm2/V s.

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