SUMMARYWith rapid development of methods for dynamic systems modeling, those with less computation effort are becoming increasingly attractive for different applications. This paper introduces a new form of Kane's equations expressed in the matrix notation. The proposed form can efficiently lead to equations of motion of multi-body dynamic systems particularly those exposed to large number of nonholonomic constraints. This approach can be used in a recursive manner resulting in governing equations with considerably less computational operations. In addition to classic equations of motion, an efficient matrix form of impulse Kane formulations is derived for systems exposed to impulsive forces.

In this paper we have presented a new form of Kane’s equations. This new form is expressed in the matrix form with the components of partial derivatives of linear and angular velocities relative to the generalized speeds and generalized coordinates. The number of obtained equations is equal to the number of degrees of freedom represented in a closed form. Also the equations can be rearranged to appear only one of the time derivatives of generalized speeds in each equation. This form is appropriate especially when one intends to derive equations recursively. Hence in addition to the simplicity, the amount of calculations is noticeably reduced and also can be used in a control unit.

Micro-electromechanical systems (MEMS) have wide application in the development of sensors for the detection of magnitudes in almost any domain [1]. Resonant mode operation of micro and nano-scale oscillators have gained wide interest for applications including filters, amplifiers, non-linear mixers, atomic scale imaging, biological and chemical sensors. The device that we propose is an electrically actuated microcantilever beam. More precisely, in our design the microcantilever constitutes the movable plate of a micro-capacitor and its displacement is controlled by the voltage applied across the plates. Review of literature shows that the electric field pattern between the beam and the substrate has always been assumed to be straight parallel lines normal to the substrate. In reality the electric field must be normal both to the substrate and the beam. Considering this phenomenon, the force exerted on the beam should always be normal to its surface and as the beam's curvature increases, the direction of the force also deviates proportionally.

The differential equation governing the motion of an electrically excited capacitive microcantilever beam is a nonlinear PDE [1]. Accurate analysis about its motion is of great importance in MEMS' dynamical response. In this paper first the nonlinear 4th order 2 point boundary value problem (ODE) governing the static deflection of the system is solved using three methods. 1. The nonlinear part is linearized and its exact solution is obtained. 2. For low applied DC voltages (not near pull-in) the solutin is found using the direct straight forward perturbation analysis. 3. Numerical computer solutions which are used for the previous solution's verifications. The next parts are devoted to the dynamic solution. The nonlinear time variant 4th order PDE governing the dynamic deflection of an electrically excited microbeam is scrutinized. First using the Galerkin Method the mode shapes and the first three mode temporal equations of the linearized equation are found. Considering no damping, using the perturbations method the temporal equations are solved in three states: far from resonance, near 1:1 resonance and near 1:2 resonance. Finally the damped equation is solved using the aforementioned method. In the literature no closed form solution for this problem is presented.

A numerical procedure is proposed for obtaining the static deflection, pull-in (PI) deflection and PI voltage of electrostatically excited capacitive microcantilever beams. The method is not time and memory consuming as Finite Element Analysis (FEA). Nonlinear ordinary differential equation of the static deflection of the beam is derived, w/wo considering the fringing field effects. The nondimensional parameters upon which PI voltage is dependent are then found. Thereafter, using the parameters and the numerical method, three closed form equations for pull-in voltage are developed. The results are in good agreement with others in literature.