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Benzil derivatives and aliphatic tertiary amine were synthesized through new route. The photo-sensitivities of binary photoinitiating systems composed of the benzil derivatives and tertiary amine were measured and compared with commerciallized photoinitiators in the resist screenings. Sulfo-benzil derivatives were more reactive than the other compounds.The new aliphatic tertiary amine synthesized was more reactive than NMDEA (N-methyl diethanol amine).

Six isomers of drhydroxyl benzoic acid and three isomers of trihydroxyl benzoic acid were analysed systematically with thermogravimetric analysis. They, the starting temperatures (TS), the peak temperatures (Ti) and the end temperatures (Te) in the decarboxylation reactions,were worked out based on the integral curves (TG) and the differential curves (DTG) in thermogravimetric analysis of these compounds. The carbon atoms of benzene rings connected with carboxyl groups of these compounds are numbered as C1, and the carbon atoms of carboxyl groups are numbered as C,. The chemical shift values of C1 ( S ,) and C, ( l ,) are from the NMR spectra of these compounds, and it is found that there is a linear relation between TP and S 1 or (s , -61). The net charge values of C1 (q1) and C, (q,) are from the calculations of quantum chemistry. After compared 81 and( S 7 -S 1) with q1 and(q,-q1) respectively, it is also found that there are linear relations between them. These prove that there is a close relation among S i, q1 and the reactivity of i-position on the benzene ring of a phenolic compound.

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The electronic structure of various hydroxyl substituted benzoic acids is studied by using ab initio method at HF/6-31 G* level. The importance was put on the charge distribution on benzene ring and the effect of hydroxyl group. The total negative charge on benzene ring is in inverse proportion to the number of hydroxyl substituents. The net charge change on carbon atoms of benzene ring of multi-hydroxyl benzoic acids induced by hydroxyl is very close to the simple addition of that of corresponding mono-hydroxyl benzoic acids. These phenolic acids possess one to three active sites on benzene ring where the negative charges are much more than that of other sites and than that of unsubstituted benzoic acids. The relationship of electronic structure and reactivity of the compounds is discussed. The lower decarboxylation temperature is found to be well correlated with the more negative charge on the carbon atom linked to carboxyl group for most of the measured phenolic acids.