ultivariate process capability indices (MPCI), as an important means of statistical process control (SPC), can be used to ensure the high reliability of semiconductors manufacturing process. However, the reasonable sampling number is an important factor when considering MPCI values. As general, the large sample number requires much effort and time, or even cannot be achieved. In this paper, we evaluated the impact of different sample size on the calculations of multivariate process capability indices using simulation and analyses. After getting enough data and choosing disparate sample numbers, corresponding multivariate process capability indices can be obtained, which demonstrate the relationship between sampling numbers and calculation results. The conclusions have critical guiding significance for manufacturing semiconductors with high reliability requirement.