The feasibility of low temperature fabrication of transparent electrode elements from thin films of Antimony doped Tin Oxide (SnO2:Sb, ATO) has been investigated via inkjet printing, rf magnetron sputtering and post deposition excimer laser processing. Laser processing of thin films on both glass and plastic substrates was performed using a Lambda Physik 305i excimer laser, with fluences in the range 20mJcm -2 -100mJcm

Sb doped SnO 2 has been formulated and inkjet printed onto borosilicate glass substrates. The resultant films have been post processed using traditional thermal annealing up to 440 o C and laser processing with a KrF excimer laser (λ = 248nm). Sheet resistance values of 700Ω/□ have been achieved with thermal annealing, whilst transparency remains >85% in the visible region. As a result of laser processing significant decreases in sheet resistance of the inkjet printed layers have been demonstrated indicating the viability of inkjet printing onto flexible substrates. The optical transmittance of the laser processed films has been shown to remain >85%. Initial measurements indicate that thermal and laser post processes reduce surface roughness.