We present a novel monolithic quartz vibrating beam accelerometer (QVBA), which is mainly composed of a single-beam resonator, a base-proof mass structure, and a vibration isolation frame. The sensor measures the acceleration signal perpendicular to the proof mass surface, which is transferred into an inertial force through the proof mass. We attempted to improve the sensing structure configuration to enhance the sensitivity and suppress cross-axis sensitivity. A two-step wet etching process was successfully developed to fabricate the designed sensor, and a simple self-excitation oscillation circuit was designed to drive the fabricated accelerometer. The static measurement result demonstrated high sensitivity of about 54.46 Hz/g, and the bias stability was evaluated to be 33 μg (1σ). In the temperature range from −40 to 60 ℃, the bias frequency shift was below 1.9 ppm/℃.

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