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A hydrogel-based functional hybrid with highly uniformly dispersed nanoparticulate CdS semiconductors is proposed. The hybrid is synthesized using an in situ polymerization following an in situ chemical reduction, where the resulting particle size and the distribution of CdS nanocrystals (NCs) can be narrowly manipulated. The hybrids, containing a relatively small amount of the CdS NCs, exhibit a pronounced photoluminescence spectrum shift when in contact with a number of dielectric liquids and such a pronounced dielectric-confinement effect has been experimentally verified and modeled in this study. The sensing capability of the hybrids with respect to dielectric liquids or molecules can be optically characterized and varied depending upon the intensity of the dielectric environment surrounding the hybrids. This work suggests that the transparent, nanoporous CdS-pHEMA hybrids can be used as highly efficient optical sensing materials.

We investigate a brief method extracting properties of damage layer in low-k film using the electrical measurement of Cu interconnects. In the electrical measurements, the capacitance measurement is useful for evaluating the damage layer in low-k film because the increase of k-value in low-k film affects directly the change of Cu interconnects capacitance. The interline capacitance including the damage layer can be described by a serial connected parallel-plate capacitor model. The analysis of electromagnetic field shows that the interline capacitance does not correspond to the capacitance of parallel-plate capacitor due to the fringe factors of interline capacitance. We can eliminate the fringe factors of interline capacitance by measuring the capacitances of different line heights and succeed in acquiring the relationship between the thickness and the dielectric constant of sidewall damage layer in low-k film.

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