A metal–oxide–semiconductor (MOS) capacitor embedded with gold nanoparticles (Au NPs) has been successfully fabricated by a spin‐coating‐derived chemical solution process. The colloidal synthesized Au NPs (∼3.5 nm) were self‐assembled to 3‐aminopropyltrimethoxysilane‐modified silicon oxide substrates. With the spin‐coating process, Au NPs can be fabricated onto silicon oxide with a high packing density of 1.6 × 1012 cm−2 in a short processing time. The sol–gel‐derived HfO2 layer, acting as a control oxide, was also spin coated to construct an Si/SiO2/Au NPs/HfO2 structure. This MOS structure showed good memory effect and retention properties. This study indicates that it is appropriate to utilize the spin‐coating process in nanocrystal memory applications.

No abstract

We present a memory property study of floating gate structure embedded with Au-SiO 2 core-shell nanoparticles (NPs). Herein, the Au-SiO 2 core-shell configuration was readily fabricated by a selfassembly (SAM) layer-by-layer process using 3-aminopropyltrimethoxysilane (APTMS) as a versatile mediator. This functional APTMS served as both a binder for adsorbing colloidal Au NPs onto the substrate and to self-organize a SiO 2 ultra-thin shell to cover the Au NP cores. A two-run APTMS SAM process was employed to develop the core-shell configuration. The first-run APTMS formed a well-organized monolayer on the substrate which was responsible for the obtained uniform SAM with high density of Au NPs. Next, the second-run APTMS formed an APTMS bilayer around the Au NPs. During the SAM process, a polymerization process simultaneously occurred with the reaction of neighboring silanol groups to form an Si-O-Si network structure. The polymerization was completed by a 400 C-annealing to form a SiO 2 layer within the APTMS bilayer. In addition, the annealing also resulted in the decomposition of the APTMS and released the preformed SiO 2 layer from the APTMS bilayer. The ultra-thin SiO 2 layer was flexible enough to cover the Au NP cores, eventually constructing the Au-SiO 2 core-shell structure. Compared to Au nanocrystal (NC) memory, Au-SiO 2 core-shell NCs show a larger memory window and significantly improved retention performance, which are attributed to the SiO 2 shell-induced superior NP/oxide interface qualities and the characteristics of the

No abstract

not Available.