The ability to manipulate single atoms and molecules laterally for creating artificial structures on surfaces is driving us closer to the ultimate limit of two-dimensional nanoengineering. However, experiments involving this level of manipulation have been performed only at cryogenic temperatures. Scanning tunnelling microscopy has proved, so far, to be a unique tool with all the necessary capabilities for laterally pushing, pulling or sliding single atoms and molecules, and arranging them on a surface at will. Here we demonstrate, for the first time, that it is possible to perform well-controlled lateral manipulations of single atoms using near-contact atomic force microscopy even at room temperature. We report the creation of 'atom inlays', that is, artificial atomic patterns formed from a few embedded atoms in the plane of a surface. At room temperature, such atomic structures remain stable on the surface for relatively long periods of time.

The Sn/Si(111)-([Formula: see text]) surface is observed by using non-contact atomic force microscopy (NC-AFM) at room temperature. The images at relatively far tip-surface distances show four protrusions in each ([Formula: see text]) unit cell, which are similar to previously reported scanning tunnelling microscopy (STM) images. On the other hand, it is found that, at closer tip-surface distances, eight protrusions are clearly resolved, which indicates that the spatial resolution of NC-AFM is higher than that of STM as far as imaging this surface is concerned. Our high-resolution NC-AFM images are in good agreement with a recently proposed model based on 13 Sn atoms per unit cell.