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Cu plating bath for high-speed electrodeposition of Cu pillar was designed in consideration of a flat top morphology of pillar and a pillar height uniformity. An ideal polarization curve was assumed for the flat top morphology. To obtain the ideal polarization curve, an effect of organic additive concentration and solution agitation on the polarization curve were investigated. The basic bath components were optimized considering a Wagner number to improve pillar height uniformity. To confirm the pillar top morphology and the pillar height uniformity, a 300 mm diameter wafer was plated with Cu at 20 A/dm2. As a result, improved pillar top morphology and pillar height uniformity were obtained. The optimized plating bath was applied to the plating of large-size panel of 415 × 510 mm.

石井公二Koji ISHII 指導教員 辻田星歩 教授 法政大学大学院工学研究科機械工学専攻修士課程 An increase of turbine blade loading by the increase of turning angle makes it possible to reduce the numbers of the blades and the stages, and consequently to decrease the size and the weight of gas turbine. However, the aerodynamic performance of turbine cascade may be decreased significantly by the strengthened secondary flow. In this study, the oil-flow visualization, the blade surface static pressure measurements and the detailed internal flow measurements by using the 5-hole Pitot tube were performed for the ultra-highly loaded turbine cascade with turning angle of 160 degree in order to clarify the effects of incidence angle and the existence of tip-clearance on the flow in the cascade. The present experimental results showed that the increase of incidence angle strengths the horseshoe vortex and passage vortex, and expands the high loss region at the downstream of turbine cascade, but does not so influence the formation of leakage vortex.