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The saturation field of patterned amorphous Co-Zr-Ta-B films is adjusted by using shape anisotropy in patterned magnetic thin films for inductors. The relationship between aspect ratio and saturation field which is essential for achieving high saturation current in magnetic inductors is investigated. By changing the aspect ratio of patterned films, the in-plane easy and hard axes induced during film deposition gradually decrease and then change direction as the aspect ratio is changed, which is also verified by numerically calculating the demagnetizing field in the films. It is shown that the saturation field of inductors with patterned Co-Zr-Ta-B films can be changed thus, providing a pathway towards high saturation current in high power density applications such as voltage regulators.

In this paper, the role of the magnetic vias for magnetic flux and eddy current control is investigated using both simulations and experiments that used different patterning techniques and by altering the magnetic via width. Improved finger-shaped magnetic vias have been designed and integrated into on-chip radio frequency inductors improving the peak quality factor from 400 MHz to 800 MHz without sacrificing the inductance enhancement. The eddy currents and magnetic flux density in different areas of the magnetic vias are analyzed by 3D electromagnetic simulation. With optimized magnetic vias, the high frequency response of up to 2 GHz has been achieved.