We demonstrate the fabrication and improvements of our next generation Thermoelectric Nanowire Characterization Platform (TNCP) that is utilized to investigate the thermoelectric properties of individual nanowires to obtain the Seebeck coefficient S, electrical conductivity ı and thermal conductivity ț from the same test specimen. Only from these data, the so-called figure of merit ZT can be obtained for a single nanowire. In order to analyze the structural composition of single nanowires the TNCP has also to fulfill the purpose of a sample holder used in Transmission Electron Microscopy. Our second generation of TNCPs has been designed for these purposes. As before, individual nanowires are assembled on the TNCP by means of dielectrophoresis. After this assembly the nanowire is merely physically contacted to the electrodes on the TNCP. Contact generation is in first place done by an electron beam-induced deposition (EBID) process of Pt and measurements of S and ı are carried out on individual nanowires and presented here. As the EBID process is very complex and difficult to handle we have developed a novel method using a shadow mask process for the local evaporation of platinum to generate ohmic contact between the nanowire and the surrounding electrodes.
The magic angle coil spinning (MACS) technique has provided a breakthrough in enhancing sensitivity in magic angle spinning (MAS) NMR. However, efforts in improving the MACS detector for higher spinning speeds have been lacking. One published MACS construction technique is to solder a handwound solenoidal coil to a commercial non-magnetic capacitor and subsequently centering the detector inside the MAS rotor. An alternative method to realize these detectors is by using MEMS fabrication at the wafer scale, potentially capable of achieving reproducible MACS detectors. However, it is also important that the performance of the sensors does not deteriorate as a result of microfabrication constraints. The footprint of the detectors is a limiting factor in achieving higher spinning speeds. One of the key elements of a micro-resonator is its tuning capacitor, whose geometry has a significant influence on its electrical and mechanical performance. The quality factor of the capacitor, along with the induced eddy currents, are the key performance parameters considered. The article addresses these concerns by presenting a study of microfabricated on-chip capacitors for magic angle coil spinning (MACS) detectors. The capacitors are juxtaposed with commercially available capacitors and the most suitable fit to be integrated with a micro-coil is established.K E Y W O R D S eddy currents, magic angle coil spinning, MEMS fabrication, quality factor
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