During ultra-precision cutting of brittle materials, the wear of diamond tool seriously affects the quality of machined surface. By molecular dynamics modeling of nanometric cutting, the generation of graphitization and its formation process at the cutting edge of tool are observed. By analyzing the process, the reason of the graphitization wear is mainly thermo-chemical reactions. By calculating the changes of coordination numbers of the tool atoms, graphitization conversion rate keeps increasing along the cutting process but gets stable after a certain length, which indicates the graphitization wear will occur in the same process.