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In order to calibrate the spatial phase response nonuniformity of liquid crystal on silicon (LCoS), we propose to use a Twyman-Green interferometer to characterize the wavefront distortion, due to the inherent curvature of the device. During the characterization, both the residual carrier frequency introduced by the Fourier transform evaluation method and the lens aberration are error sources. For the tilted phase error introduced by residual carrier frequency, the least mean square fitting method is used to obtain the tilted phase error. Meanwhile, we use Zernike polynomials fitting based on plane mirror calibration to mitigate the lens aberration. For a typical LCoS with 1×12,288 pixels after calibration, the peak-to-valley value of the inherent wavefront distortion is approximately 0.25λ at 1550 nm, leading to a half-suppression of wavefront distortion. All efforts can suppress the root mean squares value of the inherent wavefront distortion to approximately λ/34.

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