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As structural components of devices and materials diminish in size, there is increasing interest in developing capabilities to analyse amorphous nano-volumes. The technique of electron energy selected reduced density function (RDF) analysis is one of the few techniques with this capability. Originally developed to study thin films [1], the technique has been recently extended to volumes approaching 1 nm in width [2]. This allows local variations in structural order to be studied, for example in intergranular films, amorphised volumes (e.g. in DVDs) and barrier layers. In extending the RDF technique to the nanoscale, a number of important experimental problems had to be overcome, including the incident probe convergence and the effect of electron beam coherence on the interpretation of the data [3-4].

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