No abstract

Nanostructured ZrO2 thin films were prepared by thermal atomic layer deposition (ALD) and by plasma-enhanced atomic layer deposition (PEALD). The effects of the deposition conditions of temperature, reactant, plasma power, and duration upon the physical and chemical properties of ZrO2 films were investigated. The ZrO2 films by PEALD were polycrystalline and had low contamination, rough surfaces, and relatively large grains. Increasing the plasma power and duration led to a clear polycrystalline structure with relatively large grains due to the additional energy imparted by the plasma. After characterization, the films were incorporated as electrolytes in thin film solid oxide fuel cells, and the performance was measured at 500 °C. Despite similar structure and cathode morphology of the cells studied, the thin film solid oxide fuel cell with the ZrO2 thin film electrolyte by the thermal ALD at 250 °C exhibited the highest power density (38 mW/cm2) because of the lowest average grain size at cathode/electrolyte interface.

Due to the poor chemical stability of CeO-based materials, doped CeO electrolytes are generally used as a stabilized ZrO protection layer/doped CeO electrolyte bilayer structure. Since the ionic conductivity of stabilized ZrO materials is lower than that of doped CeO materials, the thickness of the ZrO protective layer needs to be optimized. Thus, in this study, nano-porous anodic aluminum oxide template based scandia stabilized zirconia (ScSZ)/gadolinia doped ceria (GDC) bilayer electrolyte low temperature solid oxide fuel cells (LT-SOFCs) are successfully fabricated and investigated. The optimized thickness of the ScSZ protection layer is revealed by physical and electrochemical characterizations to maximize the performance of LT-SOFCs. The 160 nm ScSZ/400 nm GDC bilayer electrolyte LT-SOFC achieves a maximum power density of 252 mW · cm and an open circuit voltage of 1.02 V OCV at 450 °C.