Recent advances in the development of attosecond soft X-ray sources ranging into the water window spectral range, between the 1s states of carbon and oxygen (284 eV-543 eV), are also driving the development of suited broadband multilayer optics for steering and shaping attosecond pulses. The relatively low intensity of current High Harmonic Generation (HHG) soft X-ray sources calls for an efficient use of photons, thus the development of low-loss multilayer optics is of uttermost importance. Here, we report about the realization of broadband Cr/Sc attosecond multilayer mirrors with nearly atomically smooth interfaces by an optimized ion beam deposition and assisted interface polishing process. This yields to our knowledge highest multilayer mirror reflectivity at 300 eV near normal incidence. The results are verified by transmission electron microscopy (TEM) and soft/hard X-ray reflectometry.

Recent advances in the development of attosecond soft x-ray sources toward photon wavelengths below 10 nm are also driving the development of suited broadband multilayer optics for steering and shaping attosecond pulses. We demonstrate that current attosecond experiments in the sub-200-eV range benefit from these improved optics. We present our achievements in utilizing ion-beam-deposited chromium/scandium (Cr/Sc) multilayer mirrors, optimized by tailored material dependent deposition and interface polishing, for the generation of single attosecond pulses from a high-harmonic cut-off spectrum at a central energy of 145 eV. Isolated attosecond pulses have been measured by soft x-ray-pump/NIR-probe electron streaking experiments and characterized using frequency-resolved optical gating for complete reconstruction of attosecond bursts (FROG/CRAB). The results demonstrate that Cr/Sc multilayer mirrors can be used as efficient attosecond optics for reflecting 600-attosecond pulses at a photon energy of 145 eV, which is a prerequisite for present and future attosecond experiments in this energy range.

Recent advances in the development of attosecond soft X-ray sources ranging into the 'water window' spectral range, between the carbon 1s and oxygen 1s states (284 eV -543 eV), are also driving the development of suited broadband multilayer optics for attosecond beam steering and dispersion management. The relatively low intensity of current High Harmonic Generation (HHG) soft X-ray sources calls for an efficient use of photons, thus the development of low-loss multilayer optics is of uttermost importance. Here, we report about the realization of atomically smooth interfaces in broadband CrSc multilayer mirrors by an optimized ion beam deposition and assisted interface polishing process.