This tutorial review focuses on aqueous slurries of dispersed engineered nanoparticles (ENPs) used in chemical mechanical planarization (CMP) for polishing wafers during manufacturing of semiconductors.

Engineered Nanomaterials (ENs) such as silica, ceria and alumina nanoparticles have been extensively used in health care, energy and electronics. However, their toxicity and cellular uptake, which are strongly dependent on their physiochemical properties and on cell interaction, are largely unknown. The objective of this work is to study and quantify the cellular uptake of silica, ceria and alumina ENs. First, comprehensive characterization using DLS, zeta potential, BET, XRD, FTIR, Raman, SEM and TEM was done. Then, cell exposure studies were carried out on A549 lung epithetical cells to study cell viability and membrane integrity. Lastly, cellular uptake of ENs was studied by using techniques such as Confocal Raman Spectroscopy and ICP-OES and Electrochemical Cell-substrate Impedance Sensing (ECIS). ICP-OES analysis showed uptake of silica, ceria and alumina, while Confocal Raman indicated the uptake of Ceria ENs. Time-course effects of EN on A549 cells were studied using ECIS measurements.

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The goal of this paper is understand cytotoxicity of different engineered nanomaterials when exposed to different humanrelevant cell types. The objective is to address few critical questions in nanotoxicity, namely variation of cytotoxicity with cell type, nanomaterial uptake and cytotoxicity response to varying physiochemical properties. We find that silica nanoparticles to be non-toxic to both cells lines and at the tested doses, while both ZnO nanoparticles and Au nanorods were observed to be toxic at certain doses and time-points. We also observed initial evidence to demonstrate cell penetration and cell wall morphological alterations after Au and ZnO nanoparticles exposure.

A novel method is proposed for non-invasive determination of cardiovascular toxicity due to ceria nanoparticles and single-wall carbon nanotubes from intratracheal instillation in mice.