Research in organic electronics has included advances in materials, devices, and processes. Device architectures, increasingly complex circuitry, reliable fabrication methods, and new semiconductors are enabling the incorporation of organic electronic components in products including OLED displays and flexible electronic paper.
Pentacene-based thin-film integrated circuits patterned only with polymeric shadow masks and powered by near-field coupling at radio frequencies of 125 kHz and above 6 MHz have been demonstrated. Sufficient amplitude modulation of the rf field was obtained to externally detect a clock signal generated by the integrated circuit. The circuits operate without the use of a diode rectification stage. This demonstration provides the basis for more sophisticated low-cost rf transponder circuitry using organic semiconductors.
We present device results from polysilicon thin film transistors (TFTs) fabricated at a maximum temperature of 100 °C on polyester substrates. Critical to our success has been the development of a processing cluster tool containing chambers dedicated to laser crystallization, dopant deposition, and gate oxidation. Our TFT fabrication process integrates multiple steps in this tool, and uses the laser to crystallize deposited amorphous silicon as well as create heavily doped TFT source/drain regions. By combining laser crystallization and doping, a plasma enhanced chemical vapor deposition SiO2 layer for the gate dielectric, and postfabrication annealing at 150 °C, we have succeeded in fabricating TFTs with ION/IOFF ratios >5×105 and electron mobilities >40 cm2/V s on polyester substrates.
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