We use CO2 laser-induced thermoluminescence to measure radiation dose deposition profiles in thin films. Films of various thicknesses, ranging from 10 to 90 µm, are deposited on a substrate and irradiated. The deposited dose is read out at a high heating rate so that strong signals can be obtained even from thin films. Our experiments use LiF films and 90Sr and 241Am radiation sources. This method allows nondestructive measurement of deposition profiles directly in thin solid films.