Zinc oxide (ZnO) and aluminum doped zinc oxide (ZnO:Al) thin films have been deposited onto a glass substrate by sol-gel spray coating method at atmospheric pressure. X-ray diffractometer (XRD), scanning electron microscopy (SEM), and UV-Vis spectrophotometer have been used to characterize the films. XRD spectra indicated that all prepared thin films presented the wurtzite hexagonal structure. SEM images exhibited rootlike morphology on the surface of thin films and the shortest root diameter was about 0.219 μm. The UV-Vis absorption spectra exhibited the absorption edges that were slightly shifted to the lower wavelength. From this result, the incorporation of aluminum into the ZnO involved a slight increase in the optical band-gap of films. The optical bands of films were 3.102 eV, 3.115 eV, 3.118 eV, 3.115 eV, 3.109 eV, and 3.109 eV for ZnO, ZnO:Al 2%, ZnO:Al 4%, ZnO:Al 6%, ZnO:Al 8%, and ZnO:Al 10%, respectively. Increase of Al doping concentration in ZnO films contributed to the increase of their optical band-gap which can be explained by the Burstein-Moss effect.

Abstrak -Telah dilakukan sintesis dan deposisi ZnO doping Al mengunakan metode sol-gel teknik spray coating. Lapisan tipis ZnO dengan variasi doping Al diuji menggunakan UV-Vis Spestroscopy. Pengaruh penambahan doping Al pada lapisan tipis ZnO mempengaruhi pergeseran (Shift Blue) pada panjang gelombang 360 nm-380 nm, nilai transmitansi lapisan tipis pada sinar tampak dengan rentang 64%-96% dan lapisan tipis ZnO tanpa doping nilai transmitansi pada sinar tampak rata-rata lebih dari 90%. Energi celah pita optik Eg meningkat seiring dengan meningkatnya konsentrasi doping dari 0%, 2% dan 4% dengan nilai Eg 3,102 3,115 eV dan 3,118 eV. Abstract -Has performed the synthesis and deposition of Al doped ZnO using sol-gel method, spray coating technique. ZnO thin film with doping variation Al tested using UV -Vis Spestroscopy. Effect of the addition of Al doping in ZnO thin film affects the shift blue at a wavelength of 360 nm -380 nm , the transmittance values of thin film in the visible wavelength with a range of 64 % -96 % and ZnO pure thin film on visible light transmittance value of the mean average more than 90 %. The optical band gap energy increased as the doping concentration was increased from 0%, 2% and 4% with Eg value 3,102 eV,3,115 eV and 3,118 eV.