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The effects of an atomic hydrogen (H at ) pretreatment of the catalyst layer on the low temperature growth of single-walled carbon nanotubes (SWCNTs) have been investigated using a modified catalytic chemical vapor deposition system. Well-defined and isolated individual Fe nanoparticles as a catalyst are successfully formed on the defects with high trapping energy which are created on the Al 2 O 3 surface by H at pretreatment, yielding highly dense SWCNTs. The pretreatment mechanism of H at , compared to H 2 , is also discussed. It was also found that the quality of SWCNTs can be enhanced when H at is flowed with CH 4 during nanotubes growth at low temperature. In this case, the undesired carbon products and defects on catalyst seeds and nanotube walls can be selectively removed by H at . Therefore it is essential to use H at in the pretreatment stage for increasing catalytic activity and to keep the size of nanoparticles in the nm range. H at can also be employed in growth stage for enhancing SWCNTs quality and density at low temperature.

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