We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system's performance.

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We propose dual-wavelength Fourier ptychography for topographic measurement. To extend the axial measurement range, a single light-emitting diode (LED) and two appropriate bandpass filters are employed. This provides a speckle-free phase image, and reduces the possibility of a systematic error, which yields a high-quality topographic image. The proposed system can measure the surface topography in the range of nano- to micro-structures. The performance of the system is experimentally verified.

This Letter proposes a dual-wavelength, low-coherence digital holography system with a single light source, which utilizes a quantum dot (QD) film as a wavelength converter. By changing the size of the QDs, the proposed method easily yields higher and more uniform illumination of any target wavelength, compared with bandpass-filtered light-emitting diodes. Fabrication parameters of the QD film for better conversion efficiency are discussed. Using this light source with the dual-wavelength reconstruction method extends the efficiency and range of nanoscale three-dimensional height measurements.

This paper proposes a method for inspecting transparent micro-optical components that combines digital holography and pattern recognition. As many micro-optical components have array structures with numerous elements, the uniformity of each element is important. Consequently, an effective inspection requires simultaneous measurement of these elements. Pattern recognition is used to solve this issue and can be adopted effectively using the unique characteristics of digital holography to obtain both amplitude and phase information on the object. To verify this approach, an experimental demonstration was performed with a micro-lens array using a circle-detection algorithm based on the Hough Transform. As an experimental results 30 micro-lenses are detected and measured simultaneously by using proposed inspection method.