State-of-the-art sensors use active electronics to detect and discriminate light, sound, vibration and other signals. They consume power constantly, even when there is no relevant data to be detected, which limits their lifetime and results in high costs of deployment and maintenance for unattended sensor networks. Here we propose a device concept that fundamentally breaks this paradigm-the sensors remain dormant with near-zero power consumption until awakened by a specific physical signature associated with an event of interest. In particular, we demonstrate infrared digitizing sensors that consist of plasmonically enhanced micromechanical photoswitches (PMPs) that selectively harvest the impinging electromagnetic energy in design-defined spectral bands of interest, and use it to create mechanically a conducting channel between two electrical contacts, without the need for any additional power source. Our zero-power digitizing sensor prototypes produce a digitized output bit (that is, a large and sharp off-to-on state transition with an on/off conductance ratio >10 and subthreshold slope >9 dec nW) when exposed to infrared radiation in a specific narrow spectral band (∼900 nm bandwidth in the mid-infrared) with the intensity above a power threshold of only ∼500 nW, which is not achievable with any existing photoswitch technologies.

Metamaterial perfect absorbers (MPAs) are artificial materials composed of an array of subwavelength structures that manipulate electromagnetic waves to achieve extraordinary light absorption properties. Driven by the advent of the Internet of Things, MPAs are employed in microelectromechanical systems for the development of efficient and miniaturized IR detectors, imagers, and spectrometers, thanks to their lithographically tunable peak absorption, spectral selectivity, and ultrathin thickness. MPAs characterized by high absorptance in narrow spectral bands are particularly desirable for the implementation of high‐resolution IR spectroscopic sensors. Yet, no accurate analytical model is currently available to guide the design of an MPA with ultra‐narrow absorption bandwidth, while meeting all the stringent requirements for spectroscopic sensors. Here, a circuit model capable of accurately predicting spectral responses of metal–insulator–metal (MIM) IR absorbers is reported. The model is experimentally validated in the mid‐wavelength IR spectral range and exploited for the first demonstration of an MIM IR absorber that exhibits performance approaching the predicted physical limits: full‐width at half‐maximum ≈3% and near‐unity absorption (η > 99.7%) at 5.83 µm wavelength, while independent of incident angle and polarization of the impinging IR radiation. These unprecedented absorption properties are key enablers for the development of miniaturized, low‐cost, and high‐resolution spectrometers.

The use of micro-/nanoelectromechanical resonators for the room temperature detection of electromagnetic radiation at infrared frequencies has recently been investigated, showing thermal detection capabilities that could potentially outperform conventional microbolometers. The scaling of the device thickness in the nanometer range and the achievement of high infrared absorption in such a subwavelength thickness, without sacrificing the electromechanical performance, are the two key challenges for the implementation of fast, high-resolution micro-/nanoelectromechanical resonant infrared detectors. In this paper, we show that by using a virtually massless, high-electrical-conductivity, and transparent graphene electrode, floating at the van der Waals separation of a few angstroms from a piezoelectric aluminum nitride nanoplate, it is possible to implement ultrathin (460 nm) piezoelectric nanomechanical resonant structures with improved electromechanical performance (450% improved frequency × quality factor) and infrared detection capabilities (4100 × improved infrared absorptance) compared with metal-electrode counterparts, despite their reduced volumes. The intrinsic infrared absorption capabilities of a submicron thin graphene-aluminum nitride plate backed with a metal electrode are investigated for the first time and exploited for the first experimental demonstration of a piezoelectric nanoelectromechanical resonant thermal detector with enhanced infrared absorptance in a reduced volume. Moreover, the combination of electromagnetic and piezoelectric resonances provided by the same graphene-aluminum nitride-metal stack allows the proposed device to selectively detect short-wavelength infrared radiation (by tailoring the thickness of aluminum nitride) with unprecedented electromechanical performance and thermal capabilities. These attributes potentially lead to the development of uncooled infrared detectors suitable for the implementation of high performance, miniaturized and power-efficient multispectral infrared imaging systems.

In this paper, for the first time we demonstrate zero-power volatile-organic-chemical (VOC) detectors based on micromechanical switches suitable for plant health monitoring. Differently from state-of-the-art active chemical sensors, the device presented here exploits a completely passive, chemically-sensitive switch based on a bimaterial microcantilever and a passive switch-based readout mechanism to detect VOCs exceeding a predetermined concentration released by unhealthy plants. When exposed to target VOCs, the polymer/metal bimaterial beam bends downward and trigger the switch due to the stress induced from the absorption of chemicals in the polymer layer. Here we show experimental demonstrations of detecting toluene, hexenol (cis-3-Hexen-1-ol, a chemical released from plants under attack by pests) and ethanol, respectively, with our fabricated prototypes. The demonstrated high sensitivity to ethanol (∼ 8 nm/ppm) and hexenol (∼ 3.3 nm/ppm) was achieved by the optimization of device geometries showing a great promise of the proposed technology to ultimately achieve 10s ppm detection limit (with a sub-micron contact gap and voltage bias) which is required for the device operation in close proximity to a plant in an open environment.