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Photosensitive polyimide/silica hybrid materials were synthesized by reaction between 4,4 0 -hexafluoroisopropylidene diphthalic anhydride (6FDA) and 4,4 0 -oxydianiline. The intrachain chemical bonding and the interchain hydrogen bonding between the polyimide and silica moieties were increased by the incorporation of 2-(dimethylamino) ethyl acrylate and 3-aminopropyl trimetho xysilane, respectively. The photoinitiator was bis(2,4,6-trimethyl benzoyl) phenylphosphine oxide (Irgacure-819). The various coupling agents were utilized included tetrakis (allyloxy) silane (TAL). Most silica hybrid films showed better volume shrinkage and temperature resistance. The cooperation of octavinyl POSS, as the coupling agent, can lower dielectric constant (k) down to 2.48 but with the poorer volume shrinkage and temperature resistance than the other silica hybrid films. The addition of tetramethyl orthosilicate and 3-methacryloxy propyltrimethoxysilane with silica content of 5.6 wt % can reduce k down to 2.26 but with worse volume shrinkage than the incorporation with TAL. The TAL hybrid film with degree of polymerization of 25 showed the best properties that optimized photolithography, dielectric constant (k ¼ 3.81), volume shrinkage, and temperature resistance (Td5% ¼ 378 C) with only 0.22 wt % silica content.

Poly(3,4-ethylenedioxythiophene) (PEDOT) was polymerized using sulfonated poly(amic acid)s templates (SPAA1 and SPAA2) by batch operation. The new method was invented to enhance conductivities (ca. 100 -to 2000-fold) and with less reaction time from previous work (7 days vs. 3 days). Moreover, to increase the conductivity, many dopants were introduced as secondary doping compared with DMF, D-sorbitol, and surfynol that were previously used. After annealing at 180 C for 10 min, PEDOT-SPAA1and PEDOT-SPAA2 doped with benzo-1,4-dioxan and quinoxaline showed the increase in conductivity by higher percentage than any other systems, especially doped with D-sorbitol and surfynol. These showed the promising tendency to develop the annealing activated superior conductivity materials after further modifying the conducting film forming processes. However, PEDOT-SPAAs doped with benzo-1,4-dioxan, imidazole and quinoxaline via annealed at 180 C for 10 min were found to be more conductive than doped with DMF, but still lower conductive than doped with D-sorbitol and surfynol. In terms of particle size, the stable aqueous dispersions of conducting polymers prepared were comparable to polystyrene sulfonate template.

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