This article presents a procedure for the design of bulk acoustic wave (BAW) filters. The procedure consists of optimizing the modified Butterworth-Van Dyke model of each resonator, considering appropriate technological parameters. The approach is demonstrated first to design a classical aluminum nitride-based BAW filter but remains valid for other piezoelectric layers, considering either longitudinal or transverse acoustic wave coupling. The approach is finally applied to the design of a lithium niobate (LiNbO 3 ) BAW filter for wide-band filtering applications.

No abstract

In this paper we present the design, fabrication technology, and characterization of BAW filters for the Digital Cellular System (DCS) Tx-band at 1.75 GHz. The filters are fabricated with AlN-based solidly mounted resonators (SMR) using iridium electrodes, in an attempt to increase the effective electromechanical coupling factor of the BAW devices and achieve the bandwidth requirements of DCS filters. The design and optimization of the filters is performed with a simulation tool that uses a circuit model to compute the filter frequency response. Tx filters with balanced inputs and outputs and different topologies are designed and fabricated. The experimental filter response is compared with the simulations to determine the suitability of each design. DCS bandwidth requirements are fulfilled by using Ir/AlN/Ir stacks.

This article presents a design methodology for bulk acoustic wave (BAW) filters. First, an overview of BAW physical principles, BAW filter synthesis, and the modified Butterworth-van Dyke model are addressed. Next, design and optimization methodology is presented and applied to a mixed ladder-lattice BAW bandpass filter for the Universal Mobile Telecommunications System (UMTS) TX-band at 1.95 GHz and to ladder and lattice BAW bandpass filters for the DCS1800 TX-band at 1.75 GHz. In each case, BAW filters are based on AlN resonators. UMTS filter is designed with conventional molybdenum electrodes whereas DCS filters electrodes are made with innovative iridium.