Self-organized anodic titania nanostructures ͑nanoporous films, nanodot, or nanorod arrays͒ were fabricated by a combined anodization from superimposed Al/Ti layers sputter-deposited on glass substrates. The specimens were first anodized in a constant potential mode to form nanoporous anodic alumina films with different pore sizes and intervals, which worked as electric filters and rendered a through-mask anodization to the underlying titanium layer on glass. In the successive anodization, either transparent nanoporous titania films with parallel cylindrical pores ͑20-40 nm, 50-75 nm interval, 980-1100 nm thick͒ or patterned titania nanoreliefs ͑quantum nanodot or nanorod arrays; 20-100 nm, 30-260 nm, height, 50-380 nm interval͒ were fabricated on glass substrates, depending on the anodizing characteristics of titanium in different electrolytes. Particularly, X-ray photoelectron spectroscopy analysis suggested that the nanoporous anodic titania films were composed of titanium oxide ͑Ti-IV͒ and a small amount of titanium nitride ͑Ti-III͒ included with dissociated nitrogen. The transparent nanoporous titania films were amorphous in as-anodized state and transferred into polycrystalline tetragonal anatase after heating at 873 K, both exhibiting an elevated transmittance throughout the ultraviolet and visible light range.
We report on the application of combinatorial ion implantation techniques such as the moving mask system and the digital scanning system. The combinatorial library formed by ion implantation was used to optimize the green light emission from ZnO thin films.
The authors report the resonance frequency and the energy dissipation of single crystal diamond cantilevers with different dimensions, which were fabricated by ion implantation assisted technique. The resonance frequency well followed the inverse power law relationship with the length of the cantilevers and exhibited a high reproducibility with varying the dimensions. The energy dissipation decreased with increasing the cantilever length and saturated or reduced at a certain value. For the shorter cantilevers, clamping loss governed the energy dissipation. As the cantilever length increased to a certain value, defects relaxation or surface effect became dominant. The possible origins for these energy dissipations were discussed.
A novel process of fabricating transparent TiO 2 -RuO 2 /Al 2 O 3 composite nanostructures on indium tin oxide ͑ITO͒-deposited glass substrate is described. Porous alumina films with pore diameters ranging from 5 to 120 nm were first formed by anodization of aluminum layers that were sputter-deposited on glass substrates coated with a tin-doped indium oxide ͑ITO͒ film. After removing the insulative barrier layer by a chemical dissolution, the porous alumina nanostructures on ITO/glass were then used as template electrodes in a cathodic electrosynthesis to deposit titania-ruthenium compounds within the nanopores. The X-ray photoelectron spectroscopy analytic results showed that titanium and ruthenium elements in the as-electrodeposited specimens exist in oxidation ͑IV͒ and metal state, respectively. The ruthenium worked as the conducting component that enables continuous electrodeposition of titania-based deposits with high electrical resistance. After heating at 873 K for 2 h, transparent composite nanostructures with TiO 2 -RuO 2 nanofibers (20 ϳ 180 nm͒ embedded in alumina films on the ITO/glass substrate were finally achieved.
New ion implantation techniques were applied to optimize conditions such as annealing time, Cu dose, and Cu concentration for the green emission originating from Cu phosphor in ZnO thin films. Copper ions accelerated to 150 keV were implanted at room temperature. In the ZnO thin films implanted with Cu, the suitable annealing time was 90 min at 800 C. The optimal Cu dose was determined to be 4:5 Â 10 14 ions/cm 2 . The ZnO thin films optimized for effective green emission had a Cu concentration of 9 Â 10 18 ions/cm 3 .
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