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The article is devoted to the analysis of polarization reversal process arising in ferroelectrics under electron beam exposure. The advanced model was proposed to describe the polarization switching process in ferroelectrics as well as formation of polarization switching response in electron beam-induced polarization current mode of SEM taking into account the specific character of domain structure dynamics. Simulation of polarization switching current in TGS ferroelectric crystals was performed to estimate the main characteristics of electron beam-induced polarization reversal processes.