Absfrucf-We have investigated the properties of YBa2Cu307-I ramp-edge Josephson junctions with surface-modified barriers produced by Ar-ion irradiation followed by oxygen annealing. The fabricated junctions displayed RSJ-like I-V characteristics and excellent uniformity. The stray capacitance of the junctions was estimated from the ramp-edge structure. The junction capacitance was obtained by subtracting the stray capacitance from the shunting capacitance. W e estimated the barrier thickness from the junction capacitance, and found that the critical current density of the junction increased exponentially with decreasing barrier thickness. The relative dielectric constant of the barriers ranged from 13 to 18.