On-chip microsyringes are developed by integrating parallel micro actuators and a microfluidic chip. Sliders of an Electrostatically Controlled Linear Inchworm Actuator (ECLIA) are applied to manipulate microsyringes in the nanometer range, which allows liquid control on the picoliter scale. ECLIA drives sliders in parallel with high accuracy and a large stroke. The requirements for syringe performance, such as parallel and precise liquid control, can be satisfied by the above features of ECLIA. A total volume of a few microL is manipulated at a flow rate of 19-27 pL s(-1) by the stepwise motion of ECLIA sliders in a fluidic channel. Microsyringes integrated into the driving mechanism are a key component of Micro Total Analysis Systems (microTAS) due to the possibility of on-chip integration. In addition, the proposed approach has a significant implication in MEMS in that the electrostatic micro actuator performs a physical task that affects the outside structure.

Merging parallel micro actuators and Micro Total Analysis Systems ( TAS) has made it possible to control a picoliter-scale liquid in this work.Sliders of Electrostatic Controlled Linear Inchworm Actuator (ECLIA) are applied to control motions of micro syringes. ECLIA can drive its sliders in parallel with high accuracy and large stroke. Requirements for syringe performance such as precise and parallel liquid control can be satisfied by above features of ECLIA. Several tens of pL can be controlled by several tens of nm stepwise motion of ECLIA in our experiments. Micro syringes integrated with the ECLIA driving mechanism will promise further progress of lab-on-a-chip for TAS. In addition, the approach has a significant implication that the electrostatic actuator performs a physical task to the outside actuator chip.