Heteroepitaxial films of Ga 2 O 3 were grown on c-plane sapphire (0001). The stable phase β-Ga 2 O 3 was grown using the metalorganic chemical vapor deposition technique, regardless of precursor flow rates, at temperatures between 500 • C and 850 • C. Metastable α-and ε-phases were grown when using the halide vapor phase epitaxy (HVPE) technique, at growth temperatures between 650 • C and 850 • C, both separately and in combination. XTEM revealed the better lattice-matched α-phase growing semi-coherently on the substrate, followed by ε-Ga 2 O 3 . The epitaxial relationship was determined to be [1100] IMPACT STATEMENTThis study demonstrates one of the first epitaxial growths of multiple polymorphs of Ga 2 O 3 on sapphire (0001) substrates, including its β-, α-, and ε-phases. Epitaxial relationship is confirmed through HRTEM. ARTICLE HISTORY

Precise control of the hetero-epitaxy on a low-cost foreign substrate is often the key to drive the success of fabricating semiconductor devices in scale when a large low-cost native substrate is not available. Here, we successfully synthesized three different phases of Ga2O3 (α, β, and ε) films on c-plane sapphire by only tuning the flow rate of HCl along with other precursors in an MOCVD reactor. A threefold increase in the growth rate of pure β-Ga2O3 was achieved by introducing only 5 sccm of HCl flow. With continuously increased HCl flow, a mixture of βand ε-Ga2O3 was observed, until the Ga2O3 film transformed completely to a pure ε-Ga2O3 with a smooth surface and the highest growth rate (~1 µm/hour) at a flow rate of 30 sccm. At 60 sccm, we found that the film tended to have a mixture of αand ε-Ga2O3 with a dominant α-Ga2O3, while the growth rate dropped significantly (~0.4 µm/hour). The film became rough as a result of the mixture phases since the growth rate of ε-Ga2O3 is much higher than α-Ga2O3. In this HClenhanced MOCVD mode, the Cl impurity concentration was almost identical among the investigated samples. Based on our density functional theory calculation, we found that the relative energy between β-, ε-, and α-Ga2O3 became smaller thus inducing the phase change by increasing the HCl flow in the reactor. Thus, it is plausible that the HCl acted as a catalyst during 2 the phase transformation process. Furthermore, we revealed the microstructure and the epitaxial relationship between Ga2O3 with different phases and the c-plane sapphire substrates. Our HClenhanced MOCVD approach paves the way to achieving highly controllable hetero-epitaxy of Ga2O3 films with different phases for device applications.

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Two different approaches to optimize the growth conditions for high-power green light-emitting diodes (LEDs) using Ga1−xInxN∕GaN metalorganic vapor phase epitaxy are discussed. We compare typical results in terms of morphology, photo-, and electroluminescence properties. We find good results for an optimization of the lateral morphological homogeneity of the active region. An extension of growth conditions for the active layers of blue LEDs was misleading. This suggests that different emission processes are involved in blue and green LEDs. We achieve die performances of 2.5mW at 523nm (526nm dominant) for low forward voltages of 3.4V at a typical drive current of 20mA.

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