The crystal structure of BaTiO3 thin films fabricated by RF-magnetron sputtering has been investigated. As-sputtered films exhibited a cubic structure with a small grain size of about 6-8nm. After annealing at a temperature above 1100•Ž, the crystal structure changed from cubic to tetragonal, because the annealing process caused grain growth. The critical grain size of the thin films which provided the cubic structure exist ed in the range of 0.1-0.2,ƒÊm. This value agreed well with the critical grain size of BaTiO3 fine particles, 0.12ƒÊm.

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We have successfully assembled Panel-sized TFT-LCD scan drivers on LCD panels using Anisotropic Conductive Films, and have demonstrated 12.1" diagonal defect free XGA TFT-LCDs. We have also confirmed a good reliability of the driver assembly.

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