The correlation of structural electronic and mechanical properties of carbon–nickel composite
thin films has been investigated. The films were deposited on oxidized silicon substrates by dc
magnetron sputtering of Ni and C targets in argon at different temperatures between 25 and
800 °C. Composition variation was achieved by variation of the power of the Ni target with
constant power on the C target. Structural investigations were performed by transmission
electron microscopy (including high resolution) both in plan view and cross section. The
nanocomposite films consisted of metallic nanocrystals embedded in a carbon matrix. The
carbon matrix was disordered or graphite-like carbon; the crystalline phase consisted of
Ni3C
or Ni nanoparticles, depending on the deposition temperature. The temperature coefficient
of resistivity measurements at low temperature confirmed the various structures of the
carbon matrix. The samples in which the prevailing matrix was disordered carbon show the
tunneling effect and samples with graphite-like carbon matrix show metallic behavior. The
hardness of the films varies between 2 GPa (hardness of Ni) and 13 GPa depending on the
deposition temperature, but is independent of the Ni content. The highest hardness of
∼11–13 GPa and modulus
of elasticity of ∼120 GPa were obtained when the crystalline
Ni3C
nanoparticles were separated by a 2–3 nm thin carbon matrix consisting of amorphous and
graphite-like carbon phases. In these films the hardness to modulus of elasticity ratio
(H/E)
is ∼0.1.
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