The effect of nanosecond UV laser pulses on copper and low-alloy copper samples has been studied. Traces of high-temperature deformation have been found at the energy density of 0.1–1 J/cm2 in the below-threshold regime without obvious traces of melting. They manifest themselves as the results of slipping and cracking along grain boundaries, as well as traces of crystallographic slip inside grains. The surface of the metal in the irradiated zone exhibits an uplift. The damage increases with the number of pulses. The height of the resulting uplift can reach 1 μm, and even more in some cases. The results obtained are similar to the electroplastic and magnetoplastic effects. By analogy, we propose to call the detected effect opticoplastic.

Методами оптической профилометрии и сканирующей электронной микроскопии исследовано воздействие излучения наносекундного ультрафиолетового лазера (λ - 355 нм, длительность импульса 10 нс, энергия в импульсе - до 8 мДж, частота следования импульсов до 100 Гц) на монокристалл кремния. При плотности энергии ≥ 1,2 Дж/см наблюдалось образование плазменного факела и кратера. При плотности энергии ≥ 0,2 Дж/см, возникают очаги микропробоя на дефектах обработки и зафиксированы следы неконтролируемого поднятия поверхности. Облучение сканирующим пучком лазера при плотности энергии 0, 2 Дж/см образует микрократеры на поверхности размером несколько мкм. С увеличением плотности энергии размер микропробоев увеличивался, и при плотности энергии ≥ 0,7 Дж/смвоздействие сканирующим лучом образует сплошную зону повреждений. The effect of radiation of a nanosecond ultraviolet laser (λ = 355 nm, pulse duration 10 ns, pulse energy up to 8 mJ, pulse repetition rate - up to 100 Hz) on a silicon single crystal has been investigated by methods of the optical profilometry and scanning electron microscopy. At an energy density of ≥ 1,2 J/cm, formation of the plasma torch and crater was observed. At an energy density of ≥ 0,2 J/cm, pockets of microbreakdown appeared on processing defects, and traces of uncontrolled surface uplift were recorded. Irradiation with a scanning laser beam at an energy density of 0,2 J/cm forms microcraters on a surface with a size of several microns. With an increase in the energy density, the size of the microbreakdowns increased, and at an energy density ≥ 0,7 J/cm, the impact of the scanning beam forms a continuous damage zone.

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