The simultaneous generation of second and third order dispersion is demonstrated using nonlinearly chirped silicon waveguide gratings. The nonlinearly chirped gratings are designed to generate varying signs and magnitudes of group velocity dispersion and dispersion slope. The design, fabrication, and experimental characterization of the silicon waveguide gratings are performed. Second order dispersion as high as -2.3 X 10⁶ ps/nm²/km and third order dispersion as high as 1.2 X 10⁵ ps/nm²/km and as low as 1.2 X 10⁴ ps/nm²/km is demonstrated at 1.55 µm.

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