Abstract-Electrical Discharge/Spark Machining process is one of the advanced machining processes that can machine the various complex shapes from all conductor and semiconductor materials. Wide and diverse applications of spark micromachining process in microfabrication and micro to nano miniaturization tendency is promising application of spark nanomachining process in nanofabrication. Spark nanomachining process is a thermal machining process in which thermal energy produced by electric sparks is used for machining. Therefore, thermal modeling of the spark nanomachining process is very important for accurate understanding of the process and its better application in nanotechnology. In this study, thermal model of workpiece in the spark nanomachining process has been developed. The impact of variables of the spark nanomachining process on temperature distribution in the workpiece and dimensions of the machined nano-craters were analyzed.