Anodic aluminum oxide (AAO) lm with a thickness ranging from 20 to100 μm was prepared by using a large-sized Al plate (4 cm × 10 cm) to investigate the anodization parameter effect on the lm thickness and volume expansion factor. A corrosion treatment (voltage = 0 V) was performed to investigate the lm dissolution caused by acid. The actual anode surface temperature was also measured to con rm the eld-assisted nature of AAO dissolution. The lm thickness increases exponentially with temperature, and increases approximately linearly with voltage, duration or concentration. The volume expansion factor gives a rst rising and then falling trend with temperature or duration, while it has a nearly linear trend with voltage or concentration. The volume expansion factor increases with the intensi ed electric eld, while its decrease is attributed to the Joule heat-enhanced dissolution. In the case of large lm thickness (> 20 μm), the pore con nement effect may be one of the reasons for the change of volume expansion factor. In addition to the conventional parameters, the heat transfer-related parameters such as sample size also greatly affect the AAO lm growth.

Anodic aluminum oxide (AAO) film with a thickness ranging from 20 to100 μm was prepared by using a large-sized Al plate (4 cm × 10 cm) to investigate the anodization parameter effect on the film thickness and volume expansion factor. A corrosion treatment (voltage = 0 V) was performed to investigate the film dissolution caused by acid. The actual anode surface temperature was also measured to confirm the field-assisted nature of AAO dissolution. The film thickness increases exponentially with temperature, and increases approximately linearly with voltage, duration or concentration. The volume expansion factor gives a first rising and then falling trend with temperature or duration, while it has a nearly linear trend with voltage or concentration. The volume expansion factor increases with the intensified electric field, while its decrease is attributed to the Joule heat-enhanced dissolution. In the case of large film thickness (> 20 μm), the pore confinement effect may be one of the reasons for the change of volume expansion factor. In addition to the conventional parameters, the heat transfer-related parameters such as sample size also greatly affect the AAO film growth.