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Non-linear springs, which are the important structure of the microactuator powered by collaboration of electrostatic and elastic energies/forces generating the high output, consist of leaf springs and contact-parts making contact with each other in process. The two types of non-linear springs, which work laterally or vertically, were designed, fabricated, analyzed and evaluated. As a result, it became clear that there were the problems, which are a distortion of leaf springs and interference between springs, caused by the structure and the fabrication process. Therefore, a new design concept was necessary.The elastomer is superelastic material having non-linear stress-strain characteristics. A novel design concept of non-linear spring made of elastomer was proposed. They have shape like a column. The deformation characteristics and reaction force of the designed springs were analyzed by the finite element method. They showed the non-linearity. As a result, it was seen that the design concept was useful to actualize the adequate non-linear spring.

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