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Epitaxial films of chloro-aluminum- and vanadyl-phthalocyanines (AlPcCl and VOPc) have been prepared on GaAs(111)B surfaces by effective passivation of the surface dangling bonds with Se atoms. AlPcCl molecules are found to form commensurate centered rectangular lattices on the substrate with an intermolecular distance of 1.44 nm by means of reflection high energy electron diffraction. VOPc molecules, on the other hand, form incommensurate square lattices in which they are arranged along the 〈101̄〉 axes of the substrate with an intermolecular distance of 1.37 nm. The lattice matching condition between the grown films and the substrate determines the molecular arrangements.