Combinatorial sputtering is one of the useful methods that can be used to search for optimal composition of alloy materials or for new alloy materials. To search materials more efficiently, it is required that compositions and their distribution on samples can be easily controlled for the evaluation of their properties. Moreover, it is desirable that compositions change linearly to search for novel materials systematically. In conventional combinatorial sputtering method, it is difficult to fabricate samples having linear compositions distribution without moving hard masks or rotating substrate.In this paper, a novel combinatorial sputtering method with New Facing Targets Sputtering (Combi-NFTS) of material search is introduced. In this method, several sputtering targets are placed in opposite direction, and substrates are placed in vertical direction of these targets. From this structure, thin film with binary/ternary composition distribution could be synthesized onto one single substrate. Moreover, it can fabricate samples having relatively linear composition distribution without moving hard masks or rotating substrate. As an example, Cu, Zr and Ti pure targets were used to confirm the performance of Combi-NFTS. Binary system of Cu-Zr and ternary system of Cu-Zr-Ti thin films were fabricated by using Combi-NFTS. After deposition, compositions of the films were characterized by the energy dispersive X-ray spectroscopy. As a result of Cu-Zr binary system, the composition of the thin film was changed as the power of targets was changed. Moreover, composition distribution was expanded as the distance from substrate to targets was decreased. In the Cu-Zr-Ti ternary system, it was obtained similar trend for composition distribution. Moreover, the composition changed two dimensional by changing the substrate position.These results indicate that combi-NFTS can easily control the composition and composition distribution of thin films by changing the power of targets or the distance from substrate to targets which make combi-NFTS very suitable for combinatorial materials search.

SUMMARY Combinatorial search is one of the useful methods that could search for optimal composition of alloy materials or novel alloy materials. Combinatorial sputtering provides sample group (library) having different compositions in a limited place. Then, the properties of the samples can be scanned in an efficient way. In this research, magnetostrictive material with high magnetostriction, relative permeability, and resistivity was studied. Desired value of magnetostriction is more than 20 × 10−6, relative permeability is more than 4000, and resistivity is more than 100 μΩ·cm. As a result, composition that Cr content is less than 14 at.% fill the desired value of relative permeability, and more than 10 at.% fill the desired value of resistivity. There is possibility to fill the desired value of magnetostriction.

Magnetostrictive materials of the Fe-Ni-Cr ternary system for sensitivity enhancement of force sensors were searched by using a combinatorial method. Magnetostrictive materials for force sensors require large magnetostriction, high relative permeability, and high resistivity. This research is an attempt to find composition ranges that satisfy the following requirements: magnetostriction greater than 20×10 -6 , relative permeability greater than 4,000, and resistivity over 90 μΩ cm. A novel combinatorial deposition method, known as Combinatorial New Facing Targets Sputtering (Combi-NFTS) method was applied to fabricate libraries of samples with various compositions. Samples for measurement of the relative permeability and resistivity were synthesized with a composition distribution by using Combi-NFTS onto a 108 mm×76 mm glass substrate. After deposition of thin film, each sample is divided into 10 mm×10 mm. The relative permeability and resistivity were measured by using a vibrating sample magnetometer and the four probe method, respectively. Bilayer cantilever samples for evaluation of magnetostriction were fabricated onto a 6 mm×20 mm×0.1 mm Si substrate, whereby deflection of the samples changes when a magnetic field is applied. The laser lever method was used to measure the cantilever deflection. The results indicate that the composition range with an Fe content of 26-36.5 at.%, a Ni content of 61-66 at.%, and a Cr content of 7.5-9.5 at.% satisfy the requirement criteria.

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