Microelectromechanical systems (MEMS) are made of components in the range of 1 to 100 micrometers. These systems have a large application in electrical and electronic devices. The manufacturing of MEMS categorized under semiconductor device branch fabrication. The performance of such precision material very strongly depended on the mechanical and fracture properties of the composite material they get fabricated from. A MEMS thin strips are manufactured by bonding a thin copper film on a substrate of glass-reinforced laminated fabric with an epoxy resin binder. Generally, the tested samples are glass fiber laminates with a 1.5mm thickness having 35-micron copper layer. Two sets of samples were cut; first ones are in the form of a flat specimen with a small hole at the center for size effect tests whereas, the second ones are double edge notch (DENT) specimens for essential work of fracture tests. The fracture toughness of such material is measured using essential work of fracture tests. These types of material are considered a quasi-brittle material which mainly anisotropic material, therefore, the size effect is tested over this material. The results showed that the essential work of fracture for this MEMS material is measured as 72.883 / 2 and is subject to size effect which make a reduction in nominal strength namely 15%.