Recently, micro-nano robots intended for application to various fields are developed. However, motors which are robot's power are not yet practical. In this paper, to realize the motor which can be applied to micro-nano robot's power source, we established bio-motor by using surface swarming of Vibrio alginolyticus. First, we succeeded in driving the micro gear in the closed micro channel. Next, to transmit power of rotational movement, we fabricated the open micro channel, and succeeded in driving the gear in the open micro channel similarly. In addition, we revealed that ratchet type gear rotated faster than other type. Finally, we assembled the micro gear with shaft. Therefore, it became possible transmitting the power from rotational movement to outside. Thus, we achieved to construct base of bio-motor.

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We developed a new annealing method, periodic annealing, to effectively coarsen Cu grains in very narrow trenches. In the periodic annealing method, the temperature of the specimen is elevated at a rapid rate to a target temperature and the temperature is oscillated at a certain periodicity. We identified the best oscillation conditions for the system temperature using the phase field simulation method. The best conditions achieved a 98% increase in the grain diameter of the Cu trench model. A preliminary experiment using an actual 70 nm width wire showed about a 10% increase in the grain diameter, confirming the effectiveness of the periodic annealing method to coarsen Cu grains in very narrow trenches.

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