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Arrays of sputtered tungsten thermionic emmers have been fabrmcated The emmers a r microbrldge which were fabricated by removmg a sacnfmcml layer of LO, below a panernel fh. and have two thickne5Ses 0 45 and 1 1 p The emrtfmg shape varies from a s8.lgle BtrBtght wire' 6~5 0 p m ' . to a Zigzag Wwe' 10 x 2 5 0 p m ' . to sever.51 Pa.allel Stramght 'wlres' The emmers lnltlally have a high res8stance which drops an order of magnitude with an annealing current A thermionic electron current of over 10nA for a duration 01 5 to 55 mm has been measured The lifetime depends on the microbridge thickness. shape. and eminmg urrient Mmographs after em15510n indicate recrystallizalion and melting at the midpoint of the microbridges The thermionic emmers will be used as sources for a miniature scanning election microscope (MSEM) with a column length of 1-4 mm Array;, of emmers could also be used as HDCRT sources 11 the microbridge s11pp00"c were made !ccm e low therma! ca"d!%l!v!ty mater!~! !!k gkscy carbcn with a thermal cOnduCtwN of Ubbelahde Wcm-' K-' as was Suggested bv

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