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An automatic shearing interference system has been set up incorporating an ITV and a micro-computer in order to reduce measurement errors and shorten job time. The measuring principle and data collection process for the automatic measuring system are described here. The wave aberration of a planar microlens (0.91 mmφ, f=2.06 mm) was measured, and the accuracy of the present system was found to be 8.8% of λ, with the possibility of improvement.

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