Concepts of microfactories consisting of microdevices made by micromachine technologies are discussed. A microfactory is a small production system whose size is very small with respect to the dimensions of the small products. Typical examples of microfactories are classified according to production types. Microfactory systems have a great possibility to innovate the production systems of small products by making the best use of the inherent properties of the systems such as miniaturized facilities, mobility and flexibility. The microfactory saves energy, manufacturing space and mineral resources with decreasing size of the factory facilities.
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