We demonstrate sub-100 nm resolution water-window soft X-ray full-field transmission microscopy with a compact system. The microscope operates at lambda = 3.37 nm and is based on a 100 Hz table-top regenerative debris-free droplet-target laser-plasma X-ray source in combination with normal-incidence multilayer condenser optics for sample illumination. High-spatial-resolution imaging is performed with a 7.3% efficiency nickel zone plate and a 1024 x 1024 pixel CCD detector. Images of dry test samples are recorded with exposure times of a few minutes and show features smaller than 60 nm.

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Progress in lithography and nanofabrication [E. Di Fabrizio et al., Nature (London) 401, 895 (1999)] has made it possible to apply differential interference contrast (DIC) in x-ray microscopy using an original x-ray doublet lens based on two specially developed zone plates. Switching from bright-field imaging (absorption contrast) to x-ray DIC, we observe, similar to visible-light microscopy, a dramatic increase in image contrast for weak absorbing samples. We anticipate that this technique will have a significant impact on x-ray imaging and may play a role comparable to DIC imaging in visible-light microscopy.

We report on a soft x-ray microscope using a gas-discharge plasma with pseudo spark-like electrode geometry as a light source. The source produces a radiant intensity of 4 x 10(13) photons/(sr pulse) for the 2.88 nm emission line of helium-like nitrogen. At a demonstrated 1 kHz repetition rate a brilliance of 4.3 x 10(9) photons/(microm2 sr s) is obtained for the 2.88 nm line. Ray-tracing simulations show that, employing an adequate grazing incidence collector, a photon flux of 1 x 10(7) photons/(microm2 s) can be achieved with the current source. The applicability of the presented pinch plasma concept to soft x-ray microscopy is demonstrated in a proof-of-principle experiment.

Coherent diffractive imaging for the reconstruction of a two-dimensional (2D) finite crystal structure with a single pulse train of free-electron laser radiation at 7.97 nm wavelength is demonstrated. This measurement shows an advance on traditional coherent imaging techniques by applying it to a periodic structure. It is also significant that this approach paves the way for the imaging of the class of specimens which readily form 2D, but not three-dimensional crystals. We show that the structure is reconstructed to the detected resolution, given an adequate signal-to-noise ratio.