Terahertz (THz) modulators are always realized by dynamically manipulating the conversion between different resonant modes within a single unit cell of an active metasurface. In this Letter, to achieve real high-speed THz modulation, we present a staggered netlike two-dimensional electron gas (2DEG) nanostructure composite metasurface that has two states: a collective state with massive surface resonant characteristics and an individual state with meta-atom resonant characteristics. By controlling the electron transport of the nanoscale 2DEG with an electrical grid, collective-individual state conversion can be realized in this composite metasurface. Unlike traditional resonant mode conversion confined in meta-units, this state conversion enables the resonant modes to be flexibly distributed throughout the metasurface, leading to a frequency shift of nearly 99% in both the simulated and experimental transmission spectra. Moreover, such a mechanism can effectively suppress parasitic modes and significantly reduce the capacitance of the metasurface. Thereby, this composite metasurface can efficiently control the transmission characteristics of THz waves with high-speed modulations. As a result, 93% modulation depth is observed in the static experiment and modulated sinusoidal signals up to 3 GHz are achieved in the dynamic experiment, while the −3 dB bandwidth can reach up to 1 GHz. This tunable collective-individual state conversion may have great application potential in wireless communication and coded imaging.

Terahertz (THz) radiation has received much attention during the past few decades for its potential applications in various fields, such as spectroscopy, imaging, and wireless communications. To use terahertz waves for data transmission in different application systems, the efficient and rapid modulation of terahertz waves is required and has become an in-depth research topic. Since the turn of the century, research on metasurfaces has rapidly developed, and the scope of novel functions and operating frequency ranges has been substantially expanded, especially in the terahertz range. The combination of metasurfaces and semiconductors has facilitated both new opportunities for the development of dynamic THz functional devices and significant achievements in THz modulators. This paper provides an overview of THz modulators based on different kinds of dynamic tunable metasurfaces combined with semiconductors, two-dimensional electron gas heterostructures, superconductors, phase-transition materials, graphene, and other 2D material. Based on the overview, a brief discussion with perspectives will be presented. We hope that this review will help more researchers learn about the recent developments and challenges of THz modulators and contribute to this field.

Terahertz (THz) science and technology promise unique applications in high-speed communications, high-accuracy imaging, and so on. To keep up with the demand for THz systems, THz dynamic devices should feature large phase shift modulation and high speed. To date, however, only a few devices can efficiently manipulate the phase of THz waves. In this paper, we demonstrate that efficient phase modulation of THz waves can be addressed by an active and enhanced resonant metamaterial embedded with a nanostructured 2D electron gas (2DEG) layer of a GaN high electron mobility transistor (HEMT). The enhanced resonant metaunit couples the traditional dipolar and inductance-capacitance resonances together to realize a coupling mode with enhanced resonance. Embedded with the nanostructured 2DEG layer of GaN HEMT, the resonance intensity and surface current circuit of the enhanced resonant mode in the metamaterial unit can be dynamically manipulated by the electrical control of the carrier distribution and depletion of the 3 nm 2DEG, leading to a phase shift greater than 150° in simulation. In the dynamic experiments, a 137° phase shift was achieved with an external controlling voltage of only several volts in the THz transmission mode. This work represents the first realization of a phase shift greater than 100° in a dynamic experiment in transmission mode using an active metamaterial structure with only a single layer. In addition, given the high-speed modulation ability of the HEMT, this concept provides a promising approach for the development of a fast and effective phase modulator in THz application systems.

Terahertz technology is a hotspot in the current academic research. In this study, a 400 GHz broadband multi‐branch waveguide hybrid coupler is designed, but it is very difficult to fabricate. In order to release the processing difficulty, a modified five‐branch hybrid coupler has also been designed, fabricated and measured. The hybrid coupler consists of five modified branches and has been optimised to a great performance, which increases the operation bandwidth. Compared to the traditional five‐branch hybrid coupler design, this structure has a wider operation bandwidth and the bandwidth is almost the same as traditional seven‐branch hybrid coupler. Based on this model, the performance of the coupler is optimised by HFSS software. The measurement results show good performance that >18 dB return loss (S11) and isolation (S23), 90° ± 2° phase difference and 0.3 dB amplitude imbalance are obtained in the frequency range of 380–460 GHz, agreeing well with the simulation results.

No abstract